07.A Study of Roughness Improvement of Al2O3 Substrates Using Sol-Gel method
Tung-Yueh Liu, Lay-Gaik, Teoh, Jhao-Kai Huang, Ying-Chieh Lee*, “A Study of Roughness Improvement of Al2O3 Substrates Using Sol-Gel method” Procedia Engineering., 141 (2016) 108–114
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