Ping-Yuan Lee, Cheng-Xian Lin, Yaw-Teng Tseng, Ying-Chieh Lee*

Microstructure and Electrical Property of TaN Thin Films Prepared by Reactive High Power Impulse Magnetron Sputtering,

Japanese Journal of Applied Physics, 59 (2020)116502, 1-9 (IF: 1.48)

全篇論文.pdf