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061.Influences of annealing temperature on microstructure and properties for TiO2 films deposited by DC magnetron sputtering

Jie-Ting Shang, Chih-Ming Chen, Ta-Chih Cheng, Ying-Chieh Lee*,

Influences of annealing temperature on microstructure and properties for TiO2 films deposited by DC magnetron sputtering,

Japanese Journal of Applied Physics, 54, (2015) 125501, 1-6. (IF: 1.48)

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