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081.Study of Ni-Cr/CrN bilayer thin films resistor prepared by magnetron sputtering

Ying-Chieh Lee*, Voon Choong Yen, Christian Pithan, Jhen-Hau-Jan
Study of Ni-Cr/CrN bilayer thin films resistor prepared by magnetron sputtering
Vacuum, 2023, 213, July, 112085 1-7 (IF 4.4)
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