098.Plasma spraying Al2O3 and TiO¬2-doped Al2O3 ceramics coatings for the repair of worn electrostatic chuck
Ying-Chieh Lee*, Huei Jyun Shih
Plasma spraying Al2O3 and TiO¬2-doped Al2O3 ceramics coatings for the repair of worn electrostatic chuck
Journal of the American Ceramic Society, Accepted 2026-0721 (IF:3.8)
Plasma spraying Al2O3 and TiO¬2-doped Al2O3 ceramics coatings for the repair of worn electrostatic chuck
Journal of the American Ceramic Society, Accepted 2026-0721 (IF:3.8)
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